NanoTube N3 110 kV

Join the nanoscale resolution revolution

The highest imaging resolution across the full voltage range

The Excillum NanoTube N3 enables industry-leading resolution and stability in geometric-magnification X-ray imaging systems with no need for manual tuning.

The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved every time, every day.

The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

Features and benefits

  • Superior spot quality with automatic e-beam focus of true round spot 
  • 150 nm resolution consistently and automatically achieved across full kV range
  • Internal spot size measurement
  • Long-life cathode 
  • Variable spot size and power setpoints with unchanged spot position 
  • Cone-shaped front for excellent geometrical access to X-ray spot 

Technical specifications


40-110 kV

Max. power on target

9.2 W

High brightness emitter


Target material

Tungsten (W) on diamond

Min. resolution

150 nm

Target type


Min. focus-object distance

150 µm

Long term spot stability

< 100 nm1

1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.

The NanoTube N3 X-ray source consists of the head with dimensions 689 x 210 x 400 mm (L x W x H) including cables etc. The head has several mounting holes consistent with metric optic table mounting and is designed for upright or flat fastening, in any orientation including vertical or horizontal.

In addition, the NanoTube N3 consists of a power module and a chiller, both 4U (176 mm height, 19” rack), as well as a 1U (44 mm, 19” rack) control computer and a floor standing high-voltage generator, that all can be mounted up to 5m from the head.

Source head

Upright mounting

Flat mounting

HV power supply
19" rack units

The NanoTube N3 can be remotely operated through TCP/IP or directly through the GUI. The GUI can be operated on the source itself if it is equipped with monitor, keyboard and mouse, or on most computer platforms with a TCP/ IP connection to the source.

The source cannot be operated as a standalone unit and must be integrated into a system providing the proper interlock connections.

Mains: AC, single phase, 120-240 V, 16 A, 50/60 Hz.
Ambient: 20-30°C (stable within ± 0.2°C for optimal source stability), max 85% relative humidity.

True round spot

The true round spot of the NanoTube N3 is demonstrated by the highly symmetric images of a Siemens star resolution target. The innermost features are 150 nm.

The image on the left shows a SEM micrograph of a Siemens star and an X-ray projection radiograph is shown on the right.

Long term positional stability

Thanks to the advanced e-beam system of the NanoTube N3 and the integrated thermal control, excellent long-term stability is achieved. This graph illustrates the motion of the spot relative to a fix point on the anode over 8 hours as measured internally by the source when at thermal equilibrium. Naturally, great care must be taken regarding the stability of the imaging system to maintain the same stability throughout the imaging chain.

Excellent geometrical access

The end of the transmission target is the most protruding surface to allow for a sample to get as close as possible to the X-ray focal spot.

The front is furthermore cone-shaped to allow for a sturdy cone-shaped sample holder.


NanoTube N3

Safety and compliance

Excillum X-ray sources

More information

NanoTube N3 news announcement
Scientific publications & more

Related products

NanoTube N3 60 kV
NanoTube N3 160 kV
User story

Experiences with the Excillum NanoTube X-ray source

Learn about one of our customer’s experiences with our state-of-the-art X-ray source.

University of Göttingen

Phase-contrast imaging

Questions about our products?
Speak to our experts

We have a growing organization and a network of partners with the capabilities and expertise to maximize the benefits of our technology in your application.

Ask an expert
Excillum Shichao Hu image

Shichao Hu, Ph.D.

Area Sales Manager

Some X-ray methods using NanoTube N3

Phase-contrast imaging

X-ray microscopy


Customer service

Our MetalJet and NanoTube X-ray sources are designed to ensure the highest levels of performance and reliability. Whenever regular maintenance, troubleshooting or optimization are required, our team of highly experienced engineers is available to provide worldwide service and support. We also offer a wide range of preventive maintenance and troubleshooting programs to ensure that every customer achieves the highest uptime and trouble-free operation.

Learn more

This product contains features partly developed with funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No 768883, and from the EUREKA cluster co-financing program of the Swedish Innovation Agency, No 2020-02235.