Excillum, the global leader in extreme brightness microfocus and nanofocus X-ray sources, and SFA Engineering Corporation, a leading provider of automation and inspection solutions, are pleased to announce their collaboration on next-generation in-fab semiconductor inspection systems utilizing the Excillum NanoTube N3 X-ray source.
- Development of next-generation in-fab semiconductor inspection systems based on Excillum’s NanoTube N3 X-ray source.
- Initial focus on Through-Glass Via (TGV) inspection, High Bandwidth Memory (HBM)-related applications, and advanced semiconductor packaging.
- Enabling high-resolution, production-ready X-ray inspection solutions for advanced semiconductor manufacturing.
As the semiconductor industry continues to advance towards increasingly complex packaging architectures, manufacturers require new inspection solutions capable of delivering high resolution while meeting the throughput requirements of production environments. SFA Engineering Corporation and Excillum are working together to address these challenges by combining SFA Engineering Corporation’s expertise in automation and inspection systems with Excillum’s NanoTube N3 X-ray source.
The collaboration supports SFA Engineering Corporation’s strategic focus on semiconductor inspection applications, including TGV inspection, HBM applications, and advanced semiconductor packaging technologies. South Korea-based SFA Engineering Corporation plans to have the first demonstration system ready for customers in 2026, with commercial availability for the global semiconductor manufacturing market thereafter.
“We are excited to strengthen our collaboration with SFA Engineering Corporation as they expand their semiconductor inspection portfolio,” said Malcolm Lindqvist, Product Manager at Excillum. “The NanoTube N3 was developed to deliver industry-leading X-ray imaging performance and stability, and it is well positioned to support the next generation of semiconductor inspection systems.”
Malcolm Lindqvist, Product Manager Excillum
“In-fab semiconductor inspection represents an important strategic growth area for SFA Engineering Corporation,” said Ho Chul Chae, Research Group Leader at SFA Engineering Corporation. “We are impressed by the performance of the NanoTube N3 and look forward to bringing next-generation inspection solutions for advanced semiconductor manufacturing to the market.”
For further information:
Malcolm Lindqvist, Product Manager
malcolm.lindqvist@excillum.com
+46 735 032868
About SFA
SFA aims to be a leading company in AI-driven autonomous manufacturing and robotics. For more information, please visit our website at http://www.sfa.co.kr/en/
Published: September 8, 2026
