The world's smallest X-ray nanospot

NanoTube N3

The highest imaging resolution up to 60, 110 or 160 kV

The Excillum NanoTube N3 enables industry-leading 150 nm resolution in geometric-magnification X-ray imaging systems up to 160 kV depending on source model. High flux and exceptional spot stability make the source ideal for demanding 3D computed tomography applications as well as 2D imaging in both industrial and research environments.

The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is consistently achieved during day to day operation.

The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

NanoTube series

NanoTube N3 60 kV
NanoTube N3 110 kV
NanoTube N3 160 kV

Features and benefits

  • Superior spot quality with automatic e-beam focus of true round spot 
  • 150 nm resolution consistently and automatically achieved across full kV range
  • Internal absolute spot size measurement 
  • Long-life cathode 
  • Variable spot size and power setpoints with unchanged spot position 
  • Cone-shaped front for excellent geometrical access to X-ray spot 

Contact us about the NanoTube X-ray source

Technical specifications NanoTube N3 60 kV

Voltage

40-60 kV

Max. power on target

3.6 W

High brightness emitter

LaB6

Target material

Tungsten (W) on diamond

Min. resolution

150 nm

Target type

Transmission

Min. focus-object distance

150 µm

Long term spot stability

< 100 nm1

Technical specifications NanoTube N3 110 kV

Voltage

40-110 kV

Max. power on target

9.2 W

High brightness emitter

LaB6

Target material

Tungsten (W) on diamond

Min. resolution

150 nm

Target type

Transmission

Min. focus-object distance

150 µm

Long term spot stability

< 100 nm1

Technical specifications NanoTube N3 160 kV

Voltage

40-160 kV

Max. power on target

16.6 W

High brightness emitter

LaB6

Target material

Tungsten (W) on diamond

Min. resolution

150 nm

Target type

Transmission

Min. focus-object distance

150 µm

Long term spot stability

< 100 nm1

1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.

Contact us to learn more

More information

NanoTube N3 data sheet
Scientific publications
Safety and compliance

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Excillum’s sources are an integral part of system development for some of the most trusted names in X-ray instrumentation. Together, we work intensely to put the benefits of NanoTube sources into the hands of users everywhere.