
The Excillum NanoTube N1 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved at any voltage and current setting.
The NanoTube N1 also has the unique feature that it internally measures and reports the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. All in all, this enables an unprecedented true resolution of 150 nm lines and spaces.