- Superior spot quality with automatic e-beam focusing and astigmatism correction
- Internal absolute spot size measurement
- Tungsten-diamond transmission target
- LaB6 long-life cathode
- Integrated cooling for ultimate spot stability
- Wedge shaped front for excellent geometrical access to X-ray spot
- Controlled through user friendly GUI or
remotely through TCP/IP protocol
Data Sheet
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Resolution Examples
Projection radiographs of the standard JIMA RT RC-04 150 nm (left) and 200 nm (right) resolution pattern captured using the NanoTube.
Examples of 150 and 200 nm lines and spaces on the standard JIMA RT RC-04
resolution chart clearly resolved.
From experiment in collaboration with Fraunhofer EZRT using a Si Timepix detector.
SEM micrograph of a siemens star on the left, and a projection radiograph captured using the NanoTube on the right.
The true round spot of the NanoTube is demonstrated by the highly symmetric images of a Siemens-star resolution target. The innermost features are 150 nm.
From experiment in collaboration with Fraunhofer IIS (NanoCT systems) using a Dectris PILATUS3 X CdTe 300K-W detector.
Positional Stability Example
Thanks to the advanced e-beam system of the NanoTube and the integrated thermal control, excellent long term stability is achieved. This graph illustrates the motion of the image (in object coordinates) of the Siemens star mentioned above over 400 exposures during 11 h. It is worth noticing that this image motion also includes motion of the complete setup with sample, stages and detector etc., so that the actual motion of the X-ray spot is smaller.
Excellent Geometrical Access
The end of the transmission target is the most protruding surface to allow for object to get as close as possible.
The front is furthermore wedged to allow for a sturdy cone-shaped object holder.
Technical Specifications
| Voltage | 10-60 kV | Best resolution | 150 nm (lines and spaces e.g. JIMA) | |
| Max. emitted power | 6 W | Target material | Tungsten (W) on diamond | |
| Max. power abosrbed in anode | 5 W | Target type | Transmission | |
| Min. focus-object distance | 100 µm | Long term spot stability | < 50 nm 1 |
1) Standard deviation over several hours after initial warm-up.
The development of the NanoTube has been partly funded by the European Union Seventh Framework Programme (FP7/2007-2013) through Excillum’s participation the NanoXCT program (grant agreement no 280987).