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NanoTube N2 110 kV
Join the nanoscale resolution revolution

Introducing NanoTube N2 110 kV.
The highest imaging resolution at more power and higher voltage

The Excillum NanoTube N2 enables industry-leading resolution in geometric- magnification X-ray imaging systems, and with an imaging speed at 60 kV that is more than 3 times faster than with its predecessor, the NanoTube N1. At 110 kV, the NanoTube N2 enables higher penetrating power and even higher imaging speed.

The NanoTube N2 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved.

The NanoTube N2 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

Features and benefits

  • Superior spot quality with automatic e-beam focus of true round spot 
  • Internal absolute spot size measurement 
  • More than 3 times higher flux at 60 kV than the NanoTube N1. Even higher at 110 kV.
  • Long-life cathode 
  • Variable spot size and power setpoints with unchanged spot position 
  • Cone-shaped front for excellent geometrical access to X-ray spot 

Technical specifications

Voltage 20-110 kV1 Power on target 0.75-5 W
High brightness Lab6 emitter Target material Tungsten (W) on diamond
Resolution 150 nm – 600 nm Target type Transmission
Min. focus-object distance 100 µm Long term spot stability < 50 nm

1) Fully automated spot-size control at >40 kV.

True round spot

The true round spot of the NanoTube N2 is demonstrated by the highly symmetric images of a Siemens star resolution target. The innermost features are 150 nm.

The image on the left shows a SEM micrograph of a Siemens star and a projection radiograph captured using the NanoTube N2 is shown on the right.

From experiment in collaboration with Fraunhofer IIS (NanoCT systems) using a Dectris PILATUS3 X CdTe 300K-W detector.

Long term positional stability

Thanks to the advanced e-beam system of the NanoTube N2 and the integrated thermal control, excellent long-term stability is achieved. This graph illustrates the motion of the spot relative to a fix point on the anode over 14 hours as measured internally by the source when at thermal equilibrium. Naturally, great care must be taken regarding the stability of the imaging system to maintain the same stability throughout the imaging chain.

3x flux increase

The NanoTube N2 achieves an increase in flux at 60 kV by more than 3 times1 compared to its predecessor, the NanoTube N1. This example shows a tomographic slice of an SD-card, performed with the NanoTube N1 60 kV, NanoCT (top image) and the NanoTube N2 60 kV, NanoCT (bottom image) – achieving a voxel sampling of 200nm.

A comparative NanoCT measurement was done by keeping a similar level of photon counts. With the increase in flux by the NanoTube N2, the measurement time was reduced from 15 hours to 4 hours. At the same time, the signal-to-noise ratio gave even higher image quality, due to the reduced motion within the CT measurement.

1) At 110 kV, the NanoTube N2 enables higher penetrating power and even higher imaging speed.

Credit: Dr. Christian Fella, Fraunhofer Institute for Integrated Circuits IIS, Würzburg, Germany  

Excellent geometrical access

The end of the transmission target is the most protruding surface to allow for a sample to get as close as possible to the X-ray focal spot.

The front is furthermore cone-shaped to allow for a sturdy cone-shaped sample holder.

Main components

  • X-ray source head
  • Central controller
  • High-voltage generator
  • Generator controller
  • Chiller
  • High-voltage and communication cable kit
  • Software with graphical user interface

Dimensions

The NanoTube N2 X-ray source consists of the head with dimensions 646 x 220 x 372 mm (L x W x H) excluding cables. The head has several mounting holes consistent with optic table mounting.

In addition, the NanoTube N2 consists of two 4U (176 mm height) 19” rack electronics boxes, floor standing generator and a 19” rack mounted chiller, that can be mounted up to 5m from the head.

Source head dimensions

Mounting holes

Rack

Installation and operation

The NanoTube N2 can be remotely operated through TCP/IP or directly through the GUI. The GUI can be operated on the source itself if it is equipped with monitor, keyboard and mouse, or on most computer platforms with a TCP/ IP connection to the source.

The source cannot be operated as a standalone unit and must be integrated into a system providing the proper interlock connections.

Mains: AC, single phase, 200-240 V, 16 A, 50/60 Hz.
Ambient: 20-25°C (stable within ± 0.2°C for optimal source stability), max 85% relative humidity.

Downloads

NanoTube N2 brochure

Some NanoTube N2 110 kV application areas

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