Results – Ga Kα lab source on Si – Providing an XPS window to the bulk!
- Si 1s spectra from native silicon (typ. 1 monolayer) and silicon with 50nm silicon oxide layer
- Elemental Si bulk peak and Silicon oxide surface peak clearly visible
Due to the large penetration
depth of Ga Kα, the metal
silicon peak is visible
through 50nm SiO2
Image and example courtesty of Susanna Eriksson at Scienta Omicron.
AIP 2017 Review of Scientific Instruments Volume 89, Issue 7 10.1063/1.5039829,